空心微球上Al-W多层涂层的制备与表征

Preparation and Characterization of Aluminum-Tungsten Coatings on Hollow Microspheres

中文关键词: Al-W多层涂层 工作气压 壁厚均匀性 柱状晶 表面粗糙度

英文关键词: Al-W multilayer coating, working pressure, uniformity of wall thickness, columnar crystal, surface roughness

中文摘要:

      在惯性约束聚变研究中,高-低Z金属涂层对提高靶丸的性能具有重要的作用。本实验采用直流磁控溅射技术和驱动微球运动的倾斜旋转托盘与敲击装置,在GDP空心微球表面溅射了不同工作气压的Al-W多层涂层,利用扫描电镜(SEM)、原子力显微镜(AFM)、X射线衍射仪(XRD)研究气压变化对多层涂层质量的影响规律。结果表明:多层涂层的厚度均匀性好,达90%以上,涂层均呈致密的柱状晶生长,残余应力小,涂层质量受工作气压影响显著。涂层结构的致密度随气压增大而下降,涂层的形貌与颗粒尺寸发生相应的变化,致使多层涂层的表面粗糙度随气压增大呈现出先减小后增大的变化趋势。当工作气压为0.5 Pa时,Al-W涂层的综合性能最好,表面颗粒形貌为细小均匀的塔形,表面粗糙度值低至331.1 nm,残余应力小。

英文摘要:

      In the research of inertial confinement fusion, high-low Z metal coating is vital to the performance of target. Tilt rotating tray and knocking device were applied in this experiment by DC magnetron sputtering technology. The Al-W multilayer coa-tings with different working pressure were deposited on GDP hollow microspheres. And using scanning electron microscopy, atomic force microscopy and X-ray diffractometer to study the effect of working pressure on the quality of the multilayer coatings. The results show that the uniformity of thickness of the multilayer coating is better which is more than 90%. And the coating has a compact columnar crystal growth model with small residual stress. The working pressure has significant influence on the quality of the coa-tings. The density of structure decreased with pressure increased. At the same time, the morphology and particle size of the coating changes. All of which has result a similar variation tendency of the surface roughness corresponding to the surface particles. A ten-dency decreased first and then increased when the working pressure increase. Especially, when the working pressure is 0.5 Pa, the Al-W coating has the best comprehensive performance. Its surface morphology is of small homogeneous pyramid-shape and surface roughness value is as low as 331.1 nm.